Atomic Layer Deposition and Etching Simulation Schema Evolution

[SameerSamji]

This issue tracks the evolution of the ALD and ALE simulation schemas, as extracted using the Schema-Miner tool.

Version 1 (Initial Release)

• Schema derived from scientific publications using Schema-Miner and expert feedback.
• Each schema captures essential process properties, along with their respective constraints, data types, and other structural details necessary for standardized representation and interoperability.
• Included time steps, reaction dynamics, precursor modeling, and thermochemical parameters.

The extracted schemas have also been uploaded as templates to the Open Research Knowledge Graph (ORKG), and can be accessed via the following links:

ALD Simulation Schema: https://orkg.org/templates/R1364068
ALE Simulation Schema: https://orkg.org/templates/R1431983

The JSON schema for this version is available at the following Zenodo record,
Zenodo Link: https://doi.org/10.5281/zenodo.16413857

Version 2 (Semantic enrichment using the QUDT Ontology)

• Added semantic fields to all physical quantity-related properties:
  • quantityKind: The physical concept (e.g., Frequency, Time, Energy).
  • unit: The measurement unit (e.g., Hertz, Seconds, ElectronVolt).
  • quantityValue: The numeric representation of the value.
• Enhances schema reusability in scientific and semantic data systems.

All mapped properties, their quantityKind, and unit values are listed in the attached file: qudt-mapped-properties-overview.pdf

The extracted schemas have also been uploaded as templates to the Open Research Knowledge Graph (ORKG), and can be accessed via the following links:

ALD Simulation Schema: https://orkg.org/templates/R1368294
ALE Simulation Schema: https://orkg.org/templates/R1434008

Zenodo Link: https://doi.org/10.5281/zenodo.16603412