Here is the first draft of the section of minimum length scale. The code still needs to be tweaked to improve the accuracy, and some curves in the figure will be replaced.
Paragraph in the main text
The minimum length scale (MLS) of a binary design pattern typically associates with the minimum diameter of circular features, as shown in Figures 2(a), (b), and (c). For a design pattern $A$ and a circular structuring element $B$ with its diameter not greater than the MLS of $A$, the morphological opening and closing of A by B satisfies
$A \circ B = A \bullet B = A$,
where $A \circ B = (A \ominus B) \oplus B$ is the morphological opening of $A$ by $B$, which is an erosion denoted as $\ominus$ followed by a dilation denoted as $\oplus$. Likewise, $A \bullet B = (A \oplus B) \ominus B$ is the morphological closing of $A$ by $B$, which is a dilation followed by an erosion. To identify the MLS, one can compare $A \circ B$ with $A \bullet B$ under a series of structuring elements $B$ with different diameters. Ideally, the minimum diameter that results in different $A \circ B$ and $A \bullet B$ or the maximum diameter that allows the same $A \circ B$ and $A \bullet B$ is the MLS. In principle, this process can be implemented with binary search, which starts from the maximum possible MLS, namely, the shortest edge of the design pattern. However, if this strategy based on comparison is carried out numerically, the discretization of $A$ and $B$ may cause large error in the calculated MLS. To reduce this side effect of discretization, we regard an interior solid pixel in $|A \circ B - A \bullet B|$ as a signature of significantly different $A \circ B$ and $A \bullet B$. As shown in Figure 2(d), in a 2d pattern, an interior solid pixel is a solid pixel with its all four neighbors being solid. Our stipulation on the significant difference excludes unwanted marginal effects and spurious results caused by discretization. Generally, the error of MLSs estimated by this method is at most the size of several pixels. If the MLS is much larger than the pixel size, the error would be relatively small; if the MLS is comparable to the pixel size, the error will be relatively large. In particular, as shown in Figure 2(b), if the design pattern contains sharp corners that are not small perturbations at the single-pixel level, the MLS should be zero but the method gives a nonzero value. On the other hand, we normally do not consider the sharp corners formed by the edges of a design pattern as an MLS feature.
Figure
Figures for minimum length scales.pdf
Caption
Morphological transformations as tools for searching the minimum length scale. (a) Square with rounded corners under morphological transformations. The diameters of the two structuring elements are 1.4 and 0.6, which are above and below the declared MLS 1.0, respectively. (b) Square under morphological transformations. Although the ideal MLS should be 0, the calculated MLS is 0.14, with the size of each pixel equal to 0.01. The diameters of the two structuring elements are 0.6 and 0.4. (c) Void disc under morphological transformations. The declared MLS, which is also the diameter in this case, is 2.0. The calculated MLS is 1.99. The diameters of the two structuring elements are 2.4 and 1.6, which are above and below the MLS. (d) Classification of pixels. The interior solid pixels signify the difference in $A \circ B$ and $A \bullet B$. (e) Variation of the numbers of interior solid pixels with the diameters of structuring elements. The red arrows indicate the declared MLSs.
Here is the first draft of the section of minimum length scale. The code still needs to be tweaked to improve the accuracy, and some curves in the figure will be replaced.
Paragraph in the main text$A$ and a circular structuring element $B$ with its diameter not greater than the MLS of $A$ , the morphological opening and closing of A by B satisfies
$A \circ B = A \bullet B = A$ ,$A \circ B = (A \ominus B) \oplus B$ is the morphological opening of $A$ by $B$ , which is an erosion denoted as $\ominus$ followed by a dilation denoted as $\oplus$ . Likewise, $A \bullet B = (A \oplus B) \ominus B$ is the morphological closing of $A$ by $B$ , which is a dilation followed by an erosion. To identify the MLS, one can compare $A \circ B$ with $A \bullet B$ under a series of structuring elements $B$ with different diameters. Ideally, the minimum diameter that results in different $A \circ B$ and $A \bullet B$ or the maximum diameter that allows the same $A \circ B$ and $A \bullet B$ is the MLS. In principle, this process can be implemented with binary search, which starts from the maximum possible MLS, namely, the shortest edge of the design pattern. However, if this strategy based on comparison is carried out numerically, the discretization of $A$ and $B$ may cause large error in the calculated MLS. To reduce this side effect of discretization, we regard an interior solid pixel in $|A \circ B - A \bullet B|$ as a signature of significantly different $A \circ B$ and $A \bullet B$ . As shown in Figure 2(d), in a 2d pattern, an interior solid pixel is a solid pixel with its all four neighbors being solid. Our stipulation on the significant difference excludes unwanted marginal effects and spurious results caused by discretization. Generally, the error of MLSs estimated by this method is at most the size of several pixels. If the MLS is much larger than the pixel size, the error would be relatively small; if the MLS is comparable to the pixel size, the error will be relatively large. In particular, as shown in Figure 2(b), if the design pattern contains sharp corners that are not small perturbations at the single-pixel level, the MLS should be zero but the method gives a nonzero value. On the other hand, we normally do not consider the sharp corners formed by the edges of a design pattern as an MLS feature.
The minimum length scale (MLS) of a binary design pattern typically associates with the minimum diameter of circular features, as shown in Figures 2(a), (b), and (c). For a design pattern
where
Figure
Figures for minimum length scales.pdf
Caption$A \circ B$ and $A \bullet B$ . (e) Variation of the numbers of interior solid pixels with the diameters of structuring elements. The red arrows indicate the declared MLSs.
Morphological transformations as tools for searching the minimum length scale. (a) Square with rounded corners under morphological transformations. The diameters of the two structuring elements are 1.4 and 0.6, which are above and below the declared MLS 1.0, respectively. (b) Square under morphological transformations. Although the ideal MLS should be 0, the calculated MLS is 0.14, with the size of each pixel equal to 0.01. The diameters of the two structuring elements are 0.6 and 0.4. (c) Void disc under morphological transformations. The declared MLS, which is also the diameter in this case, is 2.0. The calculated MLS is 1.99. The diameters of the two structuring elements are 2.4 and 1.6, which are above and below the MLS. (d) Classification of pixels. The interior solid pixels signify the difference in